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Chemical agents

Chemical agents in the LITHO laboratory are stored in two safety cabinets (one for solvents, the other divided into two compartments for acids and bases) and in the refrigerator. It is mandatory to strictly follow the storage instructions provided in the safety operating manual.

Below is the exclusive list of chemical agents authorized for use in the laboratory. Any chemical agent found in the LITHO laboratory that is not included in this list will be disposed of without prior notice.

Safety Data Sheets (SDS/MSDS) and, where available, technical datasheets, are kept in hard copy on the shelf located at the laboratory entrance or can be consulted online via the links provided below.

Acetic acid

CAS #64-19-7
Storage Location:armadio acidi
Chemical Class:acid
MSDS:64-19-7.pdf

BE 7-1 + LODYNE Laporte electronic

CAS #N.A.
Storage Location:armadio acidi
Chemical Class:acid
MSDS:70456-74-5.pdf
datasheet:BufferedOxideEchants_brochure.pdf

Ethylenediaminetetraacetic acid

CAS #60-00-4
Storage Location:armadio acidi
Chemical Class:acid
MSDS:60-00-4.pdf

Formic acid

CAS #64-18-6
Storage Location:armadio acidi
Chemical Class:acid
MSDS:64-18-6.pdf

Gold etchant, standard

CAS #N.A.
Storage Location:armadio acidi
Chemical Class:acid
MSDS:gold etchant standard.pdf

Hydrochloric acid 37%

CAS #7647-01-0
Storage Location:armadio acidi
Chemical Class:acid
MSDS:7647-01-0.pdf

Hydrofluoric acid 50%

CAS #7664-39-3
Storage Location:armadio acidi
Chemical Class:acid
MSDS:7664-39-3.pdf

Nitric acid 69%

CAS #7697-37-2
Storage Location:armadio acidi
Chemical Class:acid
MSDS:7697-37-2.pdf

Phosphoric acid 85%

CAS #7664-38-2
Storage Location:armadio acidi
Chemical Class:acid
MSDS:7664-38-2.pdf

Sulphuric acid 96%

CAS #7664-93-9
Storage Location:armadio acidi
Chemical Class:acid
MSDS:7664-93-9.pdf

Potassium hydroxide

CAS #1310-58-3
Storage Location:armadio basi
Chemical Class:base
MSDS:1310-58-3.pdf

Sodium hydroxide

CAS #1310-73-2
Storage Location:armadio basi
Chemical Class:base
MSDS:1310-73-2.pdf

AR 600-55

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:developer
note:for PMMA process
MSDS:ar_600-55_56_en-gb.pdf
datasheet:allresist_produktinfos_ar600-50_englisch.pdf

AR 600-56

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:developer
note:for PMMA process
MSDS:ar_600-55_56_en-gb.pdf
datasheet:allresist_produktinfos_ar600-50_englisch.pdf

AZ 726 MIF developer

CAS #75-59-2
Storage Location:armadio basi
Chemical Class:developer
MSDS:AZ_MIF_726.pdf
datasheet:az_mif_developer.pdf

Developer for AR resists AR 300-47

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:developer
note:developer for AR resist
MSDS:ar_300-40_en-gb.pdf
datasheet:allresist_produktinfos_ar300-40_englisch.pdf

Microchem SU8 developer

CAS #N.A.
Storage Location:armadio basi
Chemical Class:developer
note:for SU8 process
MSDS:su8 developer.pdf
datasheet:SU-82000DataSheet2100and2150Ver5.pdf

Microposit developer MF 321

CAS #75-59-2
Storage Location:armadio basi
Chemical Class:developer
note:for Shipley process
MSDS:MF-321 Developer (49323).pdf
datasheet:MF300seriesdevelopers.pdf

Microresist ma-D 533-S

CAS #N.A.
Storage Location:armadio basi
Chemical Class:developer
MSDS:ma-D_533_ma-D_533_S_EN_IT.pdf
datasheet:man_1400.pdf

X AR 600-54/6

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:developer
note:for CSAR process
MSDS:ar-p_6200_en-gb.pdf
datasheet:allresist_produktinfos_ar600-50_englisch.pdf

Ammonia solution 30%

CAS #1336-21-6
Storage Location:armadio basi
Chemical Class:other
MSDS:1336-21-6.pdf

Ammonium fluoride etching mixture AF 875-125

CAS #70456-74-5
Storage Location:armadio acidi
Chemical Class:other
MSDS:70456-74-5.pdf
datasheet:BufferedOxideEchants_brochure.pdf

Aquadag Colloidal Graphite in water

CAS #N.A.
Storage Location:frigorifero
Chemical Class:other
MSDS:Aquadag colloidal graphite.pdf
datasheet:AGG303_Jan14.pdf

Bright Electroless Gold

Storage Location:armadio basi
Chemical Class:other
note:For ENIG process
MSDS:EL_Au_solution_901670.pdf
datasheet:Electroless_immersion_gold_process_Transene.pdf

Chlorotrimethylsilane

CAS # 75-77-4
Storage Location:armadio solventi
Chemical Class:other
note:Prelevare con siringa. Sostituire il volume prelevato con gas inerte. Lavare con triclorometano (cloroformio).
MSDS: 75-77-4.pdf

Chromium etchant

CAS #N.A.
Storage Location:armadio acidi
Chemical Class:other
MSDS:chromiumetch.pdf
datasheet:Chromium_etch_CAS651826.pdf

Cryophysics VARNISH

CAS #N.A.
Storage Location:frigorifero
Chemical Class:other

Demetron Leitsilber 200

CAS #N.A.
Storage Location:frigorifero
Chemical Class:other
MSDS:Leitsilber 200.pdf
datasheet:Leitsilber200.pdf

Electroless Nickel Plating Solution (Nickelex)

Storage Location:armadio basi
Chemical Class:other
note:For ENIG process
MSDS:EL_Ni_solution_901655.pdf
datasheet:Nickelex_electroless_nickel_solution_Transene.pdf

Hydrogen peroxide 30%

CAS #7722-84-1
Storage Location:armadio basi
Chemical Class:other
MSDS:7722-84-1.pdf

Iodine

CAS #7553-56-2
Storage Location:armadio basi
Chemical Class:other
MSDS:7553-56-2.pdf

N719 dye

CAS #207347-46-4
Storage Location:armadio basi
Chemical Class:other
MSDS:207347-46-4.pdf

NanoPartz Gold Nanoparticles Kit

CAS #N.A.
Storage Location:frigorifero
Chemical Class:other
MSDS:Gold nanoparticles.pdf

Platisol T Solaronix

CAS #N.A.
Storage Location:armadio basi
Chemical Class:other
MSDS:Platisol_T.pdf
datasheet:Note_Platisol_T.pdf

Sylgard 184 Silicone Elastomer Base

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:other
note:Elastomero siliconico bicomponente per microfluidica.
MSDS:Sylgard184ElastomerBase.pdf
datasheet:11-3184-sylgard-184-elastomer.pdf

Sylgard 184 Silicone Elastomer Curing Agent

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:other
MSDS:Sylgard184CuringAgent.pdf
datasheet:11-3184-sylgard-184-elastomer.pdf

Titanium(IV) oxide, anatase

CAS #1317-70-0
Storage Location:armadio basi
Chemical Class:other
MSDS:1317-70-0.pdf

Titanium(IV) oxide, rutile

CAS #1317-80-2
Storage Location:armadio basi
Chemical Class:other
MSDS:1317-80-2.pdf

Zinc oxide

CAS #1314-13-2
Storage Location:armadio basi
Chemical Class:other
MSDS:1314-13-2.pdf

AR 300-72

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:remover
note:for CSAR process (NEP)
MSDS:ar_300-70_nep_en-gb.pdf
datasheet:allresist_produktinfos_ar600-70-71_300-76-70-72-73_englisch.pdf

AR 600-71

CAS #646-06-0
Storage Location:armadio solventi
Chemical Class:remover
note:Remover for CSAR process (dioxolane)
MSDS:ar_600-71_en-gb.pdf
datasheet:allresist_produktinfos_ar600-70-71_300-76-70-72-73_englisch.pdf

Microposit remover 1165

CAS #872-50-4
Storage Location:armadio solventi
Chemical Class:remover
note:NMP
MSDS:rem1165.pdf
datasheet:ShipleyMicroposit1165.pdf

mr-Rem 660

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:remover
note:for SU8 process
MSDS:872-50-4.pdf
datasheet:Removers-mr-400-500-2013.pdf

All Resist SX AR-P 6200/2

CAS #N.A.
Storage Location:frigorifero
Chemical Class:resist
note:for CSAR process
MSDS:SX AR P 6200.pdf
datasheet:allresist_produktinfos_ar-p6200_englisch.pdf

Dow Corning XR-1541-002 (HSQ electron spin-on resist)

CAS #N.A.
Storage Location:frigorifero
Chemical Class:resist
note:for HSQ process
MSDS:xr-1541 e-beam resist msds.pdf
datasheet:XR-1541_E-Beam_resist.pdf

MicroChemicals AZ 2070 - 3.5 um

CAS #N.A.
Storage Location:frigorifero
Chemical Class:resist
MSDS:Photoresist AZ NLOF 2070.pdf
datasheet:AZ_nLOF2000.pdf

Microposit S1813 Photo Resist

CAS #N.A.
Storage Location:frigorifero
Chemical Class:resist
note:for Shipley process
MSDS:S1813.pdf
datasheet:S1800seriesDataSheet.pdf

Negative E-Beam Resists AR-N 7500.18

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:resist
note:negative EBL resist
MSDS:ar-n_7500_en-gb1.pdf
datasheet:allresist_produktinfos_ar-n7500_englisch.pdf

Negative Photoresist Series ma-N 1420

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:resist
note:Negative photoresist
MSDS:ma_n_1400.pdf
datasheet:man_1400.pdf

PMMA AR-P 679.01

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:resist
note:for PMMA process
MSDS:ar-p_639-679_en-gb.pdf
datasheet:allresist_produktinfos_ar-p630-670_englisch.pdf

PMMA AR-P 679.04

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:resist
note:for PMMA process
MSDS:ar-p_639-679_en-gb.pdf
datasheet:allresist_produktinfos_ar-p630-670_englisch.pdf

PMMA-MA 33% AR-P 610.01

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:resist
note:For PMMA process. 1% PMMA in 2-Methoxyethanol
MSDS:109-86-4.pdf
datasheet:arp610_617_uk.pdf

SU8 photoresist

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:resist
note:for SU8 process
MSDS:SU-8 2000.pdf
datasheet:SU-82000DataSheet2100and2150Ver5.pdf

Ammonium fluoride 40%

CAS #12125-01-8
Storage Location:armadio basi
Chemical Class:salt
MSDS:12125-01-8.pdf

Ammonium persulfate

CAS #7727-54-0
Storage Location:armadio basi
Chemical Class:salt
MSDS:7727-54-0.pdf

Ammonium sulfite monohydrate 92%

CAS #7783-11-1
Storage Location:armadio acidi
Chemical Class:salt
MSDS:7783-11-1.pdf

Ammonium sulphide 20%

CAS #12135-76-1
Storage Location:armadio basi
Chemical Class:salt
MSDS:12135-76-1.pdf

Iron(III)chloride hexahydrate

CAS #10025-77-1
Storage Location:armadio basi
Chemical Class:salt
MSDS:10025-77-1.pdf

Lithium chloride anhydrous

CAS #7447-41-8
Storage Location:armadio acidi
Chemical Class:salt
MSDS:7447-41-8.pdf

Lithium iodide

CAS #10377-51-2
Storage Location:armadio basi
Chemical Class:salt
MSDS:10377-51-2.pdf

Potassium hexacyanoferrate(III)

CAS #13746-66-2
Storage Location:armadio basi
Chemical Class:salt
MSDS:13746-66-2.pdf

Potassium iodide

CAS #7681-11-0
Storage Location:armadio basi
Chemical Class:salt
MSDS:7681-11-0.pdf

Sodium nitrate

CAS #7631-99-4
Storage Location:armadio basi
Chemical Class:salt
MSDS:7631-99-4.pdf

1-Methoxy-2-propyl-acetate

CAS #108-65-6
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:108-65-6.pdf

2-propanol

CAS #67-63-0
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:67-63-0.pdf

3-Methoxypropionitrile

CAS #110-67-8
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:110-67-8.pdf

4-Methyl-2-Pentanone

CAS #108-10-1
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:108-10-1.pdf

Acetone

CAS #67-64-1
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:67-64-1.pdf

Acetonitrile

CAS #75-05-8
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:75-05-8.pdf

AR 600-02 Thinner

CAS #100-66-3
Storage Location:armadio solventi
Chemical Class:solvent
note:For CSAR process. Thinner.
MSDS:AR_600-02_anisole_eng.pdf
datasheet:allresist_produktinfos_ar300-12_600-01-02-07-09_englisch.pdf

Chlorobenzene

CAS #108-90-7
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:108-90-7.pdf

Ethanol

CAS #64-17-5
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:64-17-5.pdf

Ethyl Cellulose

CAS #9004-57-3
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:9004-57-3.pdf

Ethyl lactate

CAS #97-64-3
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:97-64-3.pdf

Hexamethyldisilazane

CAS #999-97-3
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:999-97-3.pdf

Methanol

CAS #67-56-1
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:67-56-1.pdf

n-Butyl acetate

CAS #123-86-4
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:123-86-4.pdf

Terpineol

CAS #8000-41-7
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:8000-41-7.pdf

Tetrahydrofuran

CAS #109-99-9
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:109-99-9.pdf

Trichloroethylene

CAS #79-01-6
Storage Location:armadio solventi
Chemical Class:solvent
MSDS:79-01-6.pdf

AR 600-60

CAS #N.A.
Storage Location:armadio solventi
Chemical Class:stopper
note:for PMMA process
MSDS:ar_600-60_en-gb.pdf
datasheet:allresist_produktinfos_ar600-60_englisch.pdf

List automatically generated on June 15, 2026 at 13:04:11